|
Lubrication Technology, Inc. has supplied lubricants to semiconductor manufacturers since 1992. Products applicable to the semiconductor industry include perfluoropolyether (PFPE) greases and fluorinated polysiloxane greases.
Perfluoropolyethers
Characteristics of perfluoropolyethers useful in semiconductor manufacturing include:
- Low vapor pressure; low outgassing for use in extreme vacuum
- Wide temperature range
- Chemically inert; non-reactive with semiconductor manufacturing materials
- Low evaporation rate
Perfluoropolyether greases commonly used in semiconductor manufacturing and pertinent data are as follows:
|
CHRISTO-LUBE® Product
|
MCG 100
|
MCG 101
|
MCG 109
MCG 109RP
|
MCG 111
|
MCG 132
|
MCG 133
|
| |
|
Temperature Range(° F)
|
-40 to 400
|
-40 to 400
|
-100 to 550
|
-100 to 450
|
-20 to 550
|
-5 to 450
|
|
|
|
|
|
|
|
|
|
Vapor Pressure
@ 20° C (mmHg)
|
< 1 x 10-6
|
< 1 x 10-6
|
< 1 x 10-12
|
< 1 x 10-3
|
< 1 x 10-7
|
5 x 10-13
|
| |
|
|
|
|
|
|
|
Evaporation
(ASTM D-2595)
|
7.50%
|
7.50%
|
0.10%
|
1.70%
|
1.00%
|
1.00%
|
Fluorinated Polysiloxane
CHRISTO-LUBE® MCG 200A is a clean-room compatible, fluorinated polysiloxane (fluorosilicone) grease used in non-vacuum applications in the semiconductor industry. MCG 200A exhibits excellent anti-wear, extreme pressure, and anti-rust characteristics. MCG 200A is particularly useful in applications involving lead screw actuators and linear bearings in wafer handling systems, as well as electrical contacts and connectors with high engagement forces.
Technical Data
The following pages contain technical data for the aforementioned
products.
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CHRISTO-LUBE® MCG 100
CHRISTO-LUBE® MCG 100 is a wide temperature range, perfluoropolyether grease. It is especially intended for use in vacuum and other systems where non-reactivity with chemicals including strong acids and oxidizers, fuels, solvents, etc. is imperative. The grease may be used in applications including ball, needle, roller, and plain spherical bearings, electrical contacts, gears, splines, valves, screw actuators, and in systems employing elastomeric and plastic seals and o-rings. Although CHRISTO-LUBE® MCG 100 is very inert, newly exposed rubbing surfaces of aluminum and magnesium may react with the grease under certain extreme conditions.
|
PERFORMANCE TEST |
TEST METHOD |
CONDITION |
TYPICAL VALUE |
|
Temperature Range |
|
|
-40°
F to 400°
F |
|
NLGI No. |
|
|
2 |
|
Worked Penetration |
ASTM D-1403 |
60 strokes |
290 |
|
Oil Separation |
FED-STD-791, Method 321 |
30 hrs, 400°
F, max |
12% |
|
Evaporation |
ASTM D-2595 |
22 hrs, 400°
F, max |
7.5% |
|
Rust Prevention |
ASTM D-1743 |
48 hrs, 125°
F |
#1, Pass |
|
Corrosion on Copper |
ASTM D-4048 |
24 hrs, 212°
F |
1a |
|
Steel-on-steel Wear |
ASTM D-2266 |
1200 rpm, 40kg, 167°
F, 52100 steel, 2 hours |
1.00 mm (max) |
|
Low Temperature Torque |
ASTM D-1478 |
@-30°
F, Starting, max |
2,000 g-cm |
| |
|
Running, max |
1,500 g-cm |
| |
|
@-40°
F, Starting, max |
15,000 g-cm |
| |
|
Running, max |
14,000 g-cm |
|
Dirt Count |
FED-STD-791, Method 3005 |
25-74 microns, max |
500/cc |
| |
|
75 microns and over |
0/cc |
| |
|
|
|
|
Water Resistance |
ASTM D-1264 |
105°
F, 1 hour |
1.0% |
|
Resistance to Aqueous Solutions |
FED-STD-791, Method 5415 |
77°
F, 168 hours |
Pass |
| |
|
|
|
|
Film Stability and Corrosion on Steel |
Mil-PRF-27617F |
212°
F, 168 hours |
Pass |
|
Solubility in Fuel |
FED-STD-791, Method 5414 |
77°
F, 8 hours |
0.5% |
|
Oxidation Stability |
ASTM D-942 |
250°
F, 100 hours |
1 psi drop |
| |
|
|
|
|
High Temperature Performance |
ASTM D-3336 |
400°
F, 10,000 rpm |
1000 hrs + |
| |
|
|
|
|
Load Wear Index |
ASTM D-2596 |
|
125 min |
|
Weld Point |
|
Load, min |
1000 kg |
| |
|
|
|
|
LOX Impact Sensitivity |
ASTM D-2512 |
20 Drops @ 1100 mm |
No Reaction |
FREE OF OZONE DEPLETION COMPOUNDS (ODC)
CHRISTO-LUBE® MCG 101
CHRISTO-LUBE® MCG 101 is a wide temperature range, antirust, perfluoropolyether grease. It is especially intended for use in vacuum and other systems where non-reactivity with chemicals including strong acids and oxidizers, fuels, solvents, etc. is imperative. The grease may be used in applications including ball, needle, roller, and plain spherical bearings, electrical contacts, gears, splines, valves, screw actuators, and in systems employing elastomeric and plastic seals and o-rings. Although CHRISTO-LUBE®MCG 101 is very inert, newly exposed rubbing surfaces of aluminum and magnesium may react with the grease under certain extreme conditions.
|
PERFORMANCE TEST |
TEST METHOD |
CONDITION |
TYPICAL VALUE |
|
Temperature Range |
|
|
-40°
F to 400°
F |
|
NLGI No. |
|
|
2 |
|
Worked Penetration |
ASTM D-1403 |
60 strokes |
280 |
|
Oil Separation |
FED-STD-791, Method 321 |
30 hrs, 400°
F, max |
12% |
|
Evaporation |
ASTM D-2595 |
22 hrs, 400°
F, max |
7.5% |
| |
|
|
|
|
Rust Prevention |
ASTM D-1743 |
48 hrs, 125°
F |
#1, Pass |
|
Corrosion on Copper |
ASTM D-4048 |
24 hrs, 212°
F |
1a |
| |
|
|
|
|
Steel-on-steel Wear |
ASTM D-2266 |
1200 rpm, 40kg, 167°
F, 52100 steel, 2 hours |
1.00 mm (max) |
|
Low Temperature Torque |
ASTM D-1478 |
@-30°
F, Starting, max |
2,000 g-cm |
| |
|
Running, max |
1,500 g-cm |
| |
|
@-40°
F, Starting, max |
15,000 g-cm |
| |
|
Running, max |
14,000 g-cm |
| |
|
|
|
|
Dirt Count |
FED-STD-791, Method 3005 |
25-74 microns, max |
500/cc |
| |
|
75 microns and over |
0/cc |
| |
|
|
|
|
Water Resistance |
ASTM D-1264 |
105°
F, 1 hour |
1.0% |
|
Resistance to Aqueous Solutions |
FED-STD-791, Method 5415 |
77°
F, 168 hours |
Pass |
|
Film Stability and Corrosion on Steel |
Mil-PRF-27617F |
212°
F, 168 hours |
Pass |
|
Solubility in Fuel |
FED-STD-791, Method 5414 |
77°
F, 8 hours |
0.5% |
|
Oxidation Stability |
ASTM D-942 |
250°
F, 100 hours |
0 psi drop |
| |
|
|
|
|
High Temperature Performance |
ASTM D-3336 |
400°
F, 10,000 rpm |
1000 hrs + |
|
Load Wear Index |
ASTM D-2596 |
|
125 min |
|
Weld Point |
|
Load, min |
1000 kg |
| |
|
|
|
|
LOX Impact Sensitivity |
ASTM D-2512 |
20 Drops @ 1100 mm |
No Reaction |
FREE OF OZONE DEPLETION COMPOUNDS (ODC)
CHRISTO-LUBE® MCG 109
CHRISTO-LUBE® MCG 109 is a wide temperature range, perfluoropolyether grease for use in extreme environments. It is suited for use in systems where non-reactivity with harsh chemicals including strong acids and oxidizers, fuels, solvents, etc. is mandatory, and in vacuum systems where pressures may be as low as 10-12 Torr. The grease is suitable for lubricating ball, plain spherical, roller, and needle bearings of large and small diameter. It is also suitable for use in electrical contacts, gears, splines, valves, screw actuators, and in systems employing elastomeric and plastic seals, gaskets, and o-rings. Although CHRISTO-LUBE® MCG 109 is very inert, newly exposed rubbing surfaces of aluminum and magnesium may react with the grease under certain extreme conditions.
|
PERFORMANCE TEST |
TEST METHOD |
CONDITION |
TYPICAL VALUE |
|
Temperature Range |
|
|
-100°
F to 550°
F |
|
NLGI No. |
|
|
2 |
|
Unworked Penetration |
ASTM D-1403 |
|
265-300 |
|
Worked Penetration |
ASTM D-1403 |
60 strokes |
265-300 |
|
Evaporation |
ASTM D-2595 |
22 hrs, 400°
F, max |
0.10% |
|
Oil Separation |
FED-STD-791, Method 321 |
30 hrs, 400°
F, max |
11.5% |
|
Low Temperature Torque |
ASTM D-1478 |
@-100°
F, Starting, max |
3,000 g-cm |
| |
|
Running, max |
975 g-cm |
|
Four-Ball Wear Test |
ASTM D-2266 |
1200 rpm, 40kg, 167°
F, 52100 steel, 2 hours |
1.30 mm |
|
Load Wear Index |
ASTM D-2596 |
|
150 |
|
Weld Point |
|
Load, min |
1000 kg + |
|
Copper Corrosion |
ASTM D-130 |
24 hrs, 212°
F |
1b |
|
Vapor Pressure |
Knudsen |
68°
F |
10-12 Torr. |
|
High Temperature Performance |
ASTM D-3336 |
450° F, 5 lbs,
10,000 rpm
|
500 hrs + |
|
LOX Impact Sensitivity |
ASTM D-2512 |
20 Impacts
from 1100 mm |
No Reaction |
| |
|
|
|
|
Film Stability and Corrosion on Steel |
FED-STD-791, Method 5414 |
212°
F, 168 hours |
No Corrosion |
| |
|
|
|
|
Dropping Point |
ASTM D-2265 |
|
450°
F |
| |
|
|
|
|
Vacuum Thermal Stability |
NASA SP-R-0022A |
24 hrs @ 6 x 10-6 |
|
|
Weight Loss |
|
|
0.07% |
|
Volatile Condensables |
|
|
0.00% |
|
Water Vapor Recovery |
|
|
0.01% |
| |
|
|
|
|
Oxidation Stability |
ASTM D-492 |
250°
F, 100 hrs |
0 psi Drop |
FREE OF OZONE DEPLETION COMPOUNDS (ODC)
CHRISTO-LUBE® MCG 109RP
CHRISTO-LUBE® MCG 109RP is a wide temperature range, perfluoropolyether
grease for use in extreme environments. MCG 109RP is chemically
identical to MCG 109, except for the addition of a perfluoropolyether-soluble
corrosion inhibitor for optimal rust prevention. It is suited
for use in systems where non-reactivity with harsh chemicals including
strong acids and oxidizers, fuels, solvents, etc. is mandatory,
and in vacuum systems where pressures may be as low as 10-12
Torr. The grease is suitable for lubricating ball, plain
spherical, roller, and needle bearings of large and small diameter.
It is also suitable for use in electrical contacts, gears, splines,
valves, screw actuators, and in systems employing elastomeric
and plastic seals, gaskets, and o-rings. Although CHRISTO-LUBE®
MCG 109RP is very inert, newly exposed rubbing surfaces of aluminum
and magnesium may react with the grease under certain extreme
conditions.
|
PERFORMANCE TEST |
TEST METHOD |
CONDITION |
TYPICAL VALUE |
|
Temperature Range |
|
|
-100°
F to 550°
F |
|
NLGI No. |
|
|
2 |
|
Unworked Penetration |
ASTM D-1403 |
|
265-300 |
|
Worked Penetration |
ASTM D-1403 |
60 strokes |
265-300 |
|
Evaporation |
ASTM D-2595 |
22 hrs, 400°
F, max |
0.10% |
|
Oil Separation |
FED-STD-791, Method 321 |
30 hrs, 400°
F, max |
11.5% |
|
Low Temperature Torque |
ASTM D-1478 |
@-100°
F, Starting, max |
3,000 g-cm |
| |
|
Running, max |
975 g-cm |
|
Four-Ball Wear Test |
ASTM D-2266 |
1200 rpm, 40kg, 167°
F, 52100 steel, 2 hours |
1.30 mm |
|
Load Wear Index |
ASTM D-2596 |
|
150 |
|
Weld Point |
|
Load, min |
1000 kg + |
|
Copper Corrosion |
ASTM D-130 |
24 hrs, 212°
F |
1b |
|
Vapor Pressure |
Knudsen |
68°
F |
10-12 Torr. |
|
High Temperature Performance |
ASTM D-3336 |
450°
F, 5 lbs,
10,000 rpm |
500 hrs + |
|
LOX Impact Sensitivity |
ASTM D-2512 |
20 Impacts
from 1100 mm |
No Reaction |
| |
|
|
|
|
Film Stability and Corrosion on Steel |
FED-STD-791, Method 5414 |
212°
F, 168 hours |
No Corrosion |
| |
|
|
|
|
Dropping Point |
ASTM D-2265 |
|
450°
F |
| |
|
|
|
|
Vacuum Thermal Stability |
NASA SP-R-0022A |
24 hrs @ 6 x 10-6 |
|
|
Weight Loss |
|
|
0.07% |
|
Volatile Condensables |
|
|
0.00% |
|
Water Vapor Recovery |
|
|
0.01% |
| |
|
|
|
|
Oxidation Stability |
ASTM D-492 |
250°
F, 100 hrs |
0 psi Drop |
FREE OF OZONE DEPLETION COMPOUNDS (ODC)
CHRISTO-LUBE® MCG 111
CHRISTO-LUBE® MCG 111 is a wide temperature range,
perfluoropolyether grease which was developed for use in systems
where non-reactivity with harsh chemicals including strong acids
and oxidizers, fuels, solvents, etc. is an important factor. The
grease is suitable for use in applications including electrical
contacts, valves, threads, screws, bearings and in systems employing
elastomeric and plastic seals, gaskets and o-rings. Although CHRISTO-LUBE®
MCG 111 is very inert, newly exposed rubbing surfaces of aluminum
and magnesium may react with the grease under certain extreme conditions.
CHRISTO-LUBE® MCG 111 meets the specification requirements and
has been qualified under Military Specification MIL-PRF-27617F,
Types I, II, and III.
|
PERFORMANCE TEST
|
TEST METHOD
|
CONDITION
|
TYPICAL VALUE
|
|
Temperature Range
|
|
|
-100° F to 450° F
|
| |
|
|
|
|
NLGI No.
|
|
|
1-2
|
| |
|
|
|
|
Worked Penetration
|
ASTM D-1403
|
60 strokes
|
265-325
|
| |
|
|
|
|
Evaporation
|
ASTM D-2595
|
22 hrs, 400° F, max
|
1.70%
|
| |
|
|
|
|
Oil Separation
|
FED-STD-791, Method 321
|
30 hrs, 400° F, max
|
12.75%
|
| |
|
|
|
|
Four-Ball Wear Test
|
ASTM D-2266
|
1200 rpm, 40kg, 167° F, 52100 steel, 1 hour
|
1.00 mm
|
| |
|
2 hours
|
1.50 mm
|
| |
|
|
|
|
Low Temperature Torque
|
ASTM D-1478
|
@-65° F, Starting, max
|
576 g-cm
|
| |
|
60 min Running, max
|
300 g-cm
|
| |
|
|
|
|
Copper Corrosion
|
ASTM D-130
|
24 hrs, 212° F
|
1b
|
|
|
|
|
|
|
LOX Impact Sensitivity
|
ASTM D-2512
|
20 Impacts
from 1100 mm
|
No Reaction
|
| |
|
|
|
|
Oxidation Stability
|
ASTM D-492
|
250° F, 100 hrs
|
0 psi Drop
|
FREE OF OZONE DEPLETION COMPOUNDS (ODC)
CHRISTO-LUBE® MCG 132
CHRISTO-LUBE® MCG 132 is a wide temperature range, perfluoropolyether grease which was developed for use in low-pressure systems where non-reactivity with chemicals including strong acids and oxidizers, fuels, solvents, etc. is an important factor. The grease is suitable for use in applications including electrical contacts, gears, valves, screws, bearings, and in systems employing elastomeric and plastic seals, gaskets, and o-rings. Although CHRISTO-LUBE® MCG 132 is very inert, newly exposed rubbing surfaces of aluminum and magnesium may react with the grease under certain extreme conditions.
|
PERFORMANCE TEST
|
TEST METHOD
|
CONDITION
|
TYPICAL VALUE
|
|
Temperature Range
|
|
|
-20° F to 550° F
|
| |
|
|
|
|
NLGI No.
|
|
|
2
|
| |
|
|
|
|
Worked Penetration
|
ASTM D-1403
|
60 strokes
|
265-300
|
| |
|
|
|
|
Evaporation
|
ASTM D-2595
|
22 hrs, 400° F, max
|
1.00%
|
| |
|
|
|
|
Oil Separation
|
FED-STD-791, Method 321
|
30 hrs, 400° F, max
|
12.00%
|
| |
|
|
|
|
Low Temperature Torque
|
ASTM D-1478
|
@-20° F, Starting, max
|
6500 g-cm
|
| |
|
60 min Running, max
|
4875 g-cm
|
|
High Temperature Torque
|
ASTM D-3336
|
400° F, 10,000 rpm
|
1000 hrs +
|
| |
|
|
|
|
LOX Impact Sensitivity
|
ASTM D-2512
|
20 Impacts
from 1100 mm
|
No Reaction
|
FREE OF OZONE DEPLETION COMPOUNDS (ODC)
CHRISTO-LUBE® MCG 133
CHRISTO-LUBE® MCG 133 is a wide temperature range, perfluoropolyether grease suitable for lubricating mechanical parts requiring extreme-pressure lubricating properties. It is especially suitable for use in the presence of aggressive chemicals and strong oxidizers and acids. Its vapor pressure properties make it well suited for use in deep vacuums. Although CHRISTO-LUBE® MCG 133 is very inert, newly exposed rubbing surfaces of aluminum and magnesium may react with the grease under certain extreme conditions.
|
PERFORMANCE TEST
|
TEST METHOD
|
CONDITION
|
TYPICAL VALUE
|
|
Temperature Range
|
|
|
-5° F to 550° F
|
| |
|
|
|
|
NLGI No.
|
|
|
2
|
| |
|
|
|
|
Worked Penetration
|
ASTM D-1403
|
60 strokes
|
265-300
|
| |
|
|
|
|
Evaporation
|
ASTM D-2595
|
22 hrs, 400° F, max
|
1.00%
|
| |
|
|
|
|
Oil Separation
|
FED-STD-791, Method 321
|
30 hrs, 400° F, max
|
12.00%
|
| |
|
|
|
|
High Temperature Bearing Performance
|
ASTM D-3336
|
400° F, 10,000 rpm
|
1000 hrs +
|
| |
|
|
|
|
LOX Impact Sensitivity
|
ASTM D-2512
|
20 Impacts
from 1100 mm
|
No Reaction
|
| |
|
|
|
|
Vapor Pressure
|
Knudsen
|
212° F
|
5 x 10-9 Torr.
|
| |
|
|
|
|
Four Ball Wear
|
ASTM D-2266
|
1200 rpm, 40 kg, 52100 steel, 167° F,
1 hr
|
0.5 mm
|
FREE OF OZONE DEPLETION COMPOUNDS (ODC)
CHRISTO-LUBE® MCG 200A
CHRISTO-LUBE® MCG 200A is a wide temperature range, extreme pressure, anti-wear, antirust, non-migrating fluorinated polysiloxane grease. MCG 200A is suitable for use in miniature, ball roller, oscillating, needle, linear, and plain spherical bearings, gears, screw actuators, gimbal rings, and applications where low starting and running torque requirements exist. It is especially suitable for use in edge board and twist-lock connectors, twist pins, and other applications involving electrical contacts and connectors where very high engagement forces prevail.
|
PERFORMANCE TEST
|
TEST METHOD
|
CONDITION
|
TYPICAL VALUE
|
|
Temperature Range
|
|
|
-65° F to 400° F
|
| |
|
|
|
|
NLGI No.
|
|
|
2
|
| |
|
|
|
|
Worked Penetration
|
ASTM D-1403
|
60 strokes
|
270
|
| |
|
|
|
|
Evaporation
|
ASTM D-2595
|
22 hrs, 400° F, max
|
10.00%
|
| |
|
|
|
|
Oil Separation
|
FED-STD-791, Method 321
|
30 hrs, 400° F, max
|
6.10%
|
| |
|
|
|
|
Load Wear Index
|
ASTM D-2596
|
|
170+
|
|
Weld Point
|
|
|
1000 kg+
|
| |
|
|
|
|
Four Ball Wear
|
ASTM D-2266
|
1200 rpm, 40 kg, 52100 steel, 167° F,
1 hr
2 hrs
|
0.5 mm
1.00 mm
1.30 mm
|
| |
|
|
|
|
Low Temperature Torque
|
ASTM D-1478
|
-30° F, Starting
Running
|
520 g-cm
228 g-cm
|
| |
|
-40° F, Starting
Running
|
1200 g-cm
365 g-cm
|
| |
|
-50° F, Starting
Running
|
2080 g-cm
618 g-cm
|
| |
|
-65° F, Starting
Running
|
6090 g-cm
1140 g-cm
|
|
